Tokyo Electron grant share with robotics as a theme is 44% in Q1 2024. Grant share is based on the ratio of number of grants to total number of patents.

Recent Patents

Application: Substrate transfer system and atmospheric transfer module (Patent ID: US20240047254A1)

The patent filed by Tokyo Electron Ltd. describes a substrate transfer system that includes various modules such as a load lock module, an atmospheric transfer module, a vacuum transfer module, a substrate processing module, an aligner module, and storage modules. The substrate transfer robot within the system includes a base that moves along a sidewall, a substrate transfer arm, and a flow rectifier that creates an obliquely downward airflow. The system is designed to efficiently transfer substrates between different processing modules while maintaining alignment and minimizing misalignments.

The patent also includes multiple claims detailing the configuration and arrangement of the transfer system components, such as the placement of storage modules, load lock modules, and aligner modules. The aligner modules are specifically designed to correct misalignments of edge rings and substrates by utilizing rotating units, driving units, detectors, and controllers. The aligner modules ensure precise alignment of substrates and edge rings during the transfer process, enhancing the overall efficiency and accuracy of the substrate transfer system.

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