Seiko Epson has filed a patent for a physical quantity sensor. The sensor includes a substrate, fixed electrodes, movable bodies, and a shielder. The movable bodies are swingable with respect to the substrate, and a shielder is provided between them. The patent aims to improve the functionality and accuracy of physical quantity sensors. GlobalData’s report on Seiko Epson gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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Physical quantity sensor with swingable movable bodies and fixed electrodes
A recently filed patent (Publication Number: US20230314465A1) describes a physical quantity sensor that can be used in an inertial measurement unit. The sensor includes a substrate with fixed electrodes arranged along two orthogonal directions. Two movable bodies are provided, each capable of swinging about a rotation axis. The first movable body faces the fixed electrodes and is swingable about a first rotation axis, while the second movable body faces the fixed electrodes and is swingable about a second rotation axis. In a plan view, the first and second rotation axes are positioned between the fixed electrodes. A shielder is provided between the two movable bodies along the first direction.
The potential of the shielder is an intermediate potential between the potentials of the first and second movable bodies. In one embodiment, the potential of the shielder is the same as the potential of the substrate. The shielder can be a wall provided on the substrate and includes a first shield extending along the first direction between the two movable bodies. Additionally, a second shield extends from one end side of the first shield along the first movable body in the second direction, and a third shield extends from the other end side of the first shield along the second movable body in a direction opposite to the second direction.
The physical quantity sensor also includes anchor points fixed to the substrate and support beams coupling the anchor points to the movable bodies, allowing them to swing. The first movable body includes a first mass part and a second mass part, while the second movable body includes a third mass part and a fourth mass part. The second mass part is heavier than the first mass part, and the fourth mass part is lighter than the third mass part.
The sensor further includes a drive circuit that outputs drive signals to the movable bodies and a detection circuit with a differential amplifier circuit. The detection circuit receives signals from the fixed electrodes and performs signal processing. The physical quantity sensor can be used in an inertial measurement unit, and a controller is provided to perform control based on the detection signal output from the sensor.
In summary, the patent describes a physical quantity sensor with movable bodies and fixed electrodes, along with a shielder and support beams for swinging motion. The sensor can be used in an inertial measurement unit, and a controller is included for control purposes.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
