Lam Research has been granted a patent for a method that synchronizes radio frequency (RF) generators. The method involves receiving recipe sets for operating two RF generators and executing them in sync with a digital pulsed signal, ensuring coordinated output of pulse blocks from both generators. GlobalData’s report on Lam Research gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Lam Research, 3D memory devices was a key innovation area identified from patents. Lam Research's grant share as of June 2024 was 55%. Grant share is based on the ratio of number of grants to total number of patents.
Synchronization of radio frequency generators using recipe sets
The patent US12046450B2 outlines a method and system for synchronizing the operation of two radio frequency (RF) generators using digital pulsed signals and synchronization signals. The method involves receiving distinct recipe sets for each RF generator, which contain information about multiple pulse blocks necessary for their operation. Upon receiving a digital pulsed signal, both RF generators execute their respective recipe sets. The first RF generator generates a synchronization signal, which is sent to the second RF generator, enabling both generators to output their pulse blocks in a synchronized manner. The synchronization signal can be generated by a host computer, which also provides the digital pulsed signal.
Additionally, the patent describes the structure of the pulse blocks, indicating that they represent envelopes of RF signal variables, each containing multiple states. The synchronization signal consists of a series of pulses, with specific time intervals determined by the characteristics of the pulse blocks. The system is designed to allow for a delay in the output of pulse blocks from the second RF generator relative to the first, ensuring precise timing in their operations. The digital pulsed signal is specified as a transistor-transistor logic (TTL) signal, and the synchronization signal may include information about its frequency. Overall, the patent presents a detailed framework for achieving synchronized RF signal generation through coordinated control of multiple RF generators.
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