KLA has been granted a patent for a manufacturing method that uses patterned electromagnetic energy to create two-dimensional patterns in photosensitive layers. These layers are laminated to form a multi-layer stack, which is then developed to produce a three-dimensional structure. The system includes advanced patterning and lamination assemblies. GlobalData’s report on KLA gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on KLA, Defect detection models was a key innovation area identified from patents. KLA's grant share as of June 2024 was 58%. Grant share is based on the ratio of number of grants to total number of patents.
3d structure manufacturing using patterned electromagnetic energy
The patent US12042984B2 describes a sophisticated manufacturing system designed to create multi-layer structures using a dry film comprising photosensitive material. Central to this system is a patterning assembly that employs a light source to apply patterned electromagnetic energy to the first side of each layer in a sequence. This process generates two-dimensional (2D) patterns that correspond to slices of a predefined three-dimensional (3D) structure. The assembly is engineered to deliver energy at a flux significantly exceeding the threshold required for full exposure of the photosensitive material, utilizing overlapping spots to enhance pattern fidelity. Additionally, the system includes a lamination assembly featuring a hot roller that applies pressure to the opposite side of the dry film, a rotating stage, and multiple rollers that ensure uniform contact across the film.
Further enhancements to the system include capabilities for pre-forming cavities within layers, allowing for the insertion of functional components via a robotic mechanism. A printing subsystem is also integrated, which utilizes laser-induced forward transfer (LIFT) technology to deposit conductive structures or adhesive droplets into the layers before lamination. This subsystem is specifically designed to treat areas of the layers to improve adhesion for metal droplets, ensuring precise application. The overall design of the system facilitates the embedding of functional components and the formation of conductive structures, thereby enabling the production of complex, multi-layered devices with integrated functionalities.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
