Screen had 31 patents in future of work during Q1 2024. Screen Holdings Co Ltd filed patents related to semiconductor wafer preheating with VCSELs and LED lamps, support device for adjusting parameters of substrate processing apparatus using machine learning models, illumination optical system for shaping incident light into a top hat distribution, and a printing method for back printing on transparent medium adjusting ink amounts based on permeability information. These inventions aim to improve efficiency, accuracy, and quality in various manufacturing processes. GlobalData’s report on Screen gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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Screen grant share with future of work as a theme is 48% in Q1 2024. Grant share is based on the ratio of number of grants to total number of patents.
Recent Patents
Application: Light irradiation type heat treatment apparatus (Patent ID: US20240105474A1)
The patent filed by Screen Holdings Co Ltd describes an auxiliary heating part for preheating semiconductor wafers using a combination of LED lamps and VCSELs. The LED lamps irradiate the entire surface of the wafer, while the VCSELs target the peripheral portion prone to temperature decrease. A common power supply circuit controls both types of light sources, reducing size and costs associated with power supply circuitry.
The heat treatment apparatus includes a chamber, holder, LED lamps, VCSELs, and a common power supply circuit. The second light source (VCSEL) emits light with higher directivity than the first light source (LED lamp). The power supply circuit can include a PWM control circuit or a constant-current circuit. The VCSEL targets the peripheral portion of the substrate, while a flash lamp can also be used for additional irradiation. This innovative design allows for efficient preheating of semiconductor wafers while minimizing power supply circuit size and costs.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
