Onto Innovation. has been granted a patent for a method that utilizes an effective cell approximation to analyze standard logic cells. This method involves producing light, measuring its reflection from a sample, and comparing data to determine characteristics of the logic cell based on its density of lines and spaces. GlobalData’s report on Onto Innovation gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Onto Innovation, Defect detection models was a key innovation area identified from patents. Onto Innovation's grant share as of June 2024 was 59%. Grant share is based on the ratio of number of grants to total number of patents.
Method for measuring characteristics of standard logic cells
The patent US12013350B2 outlines a method and an optical metrology device designed to analyze standard logic cells on a sample. The method involves producing light from a light source that is directed onto a sample, where it is reflected and subsequently detected. The process includes obtaining data for an effective cell approximation, which is a smaller representation of a standard logic cell that captures the density of lines and spaces within it. This effective cell approximation is utilized to acquire measured data from the reflected light, allowing for the determination of characteristics of the standard logic cell based on the comparison of measured and calculated data.
The claims further detail that the effective cell approximation can incorporate non-periodic patterns and may be based on specific areas of the standard logic cell. The method allows for the adjustment of parameters within the effective cell approximation model to achieve an acceptable fit with the measured data. Additionally, the optical metrology device is equipped with a light source, a detector, and a processor that facilitates the entire process, including the iterative adjustment of parameters to refine the analysis. The device can also utilize metrology targets that embody the effective cell approximation, enhancing the accuracy of the measurements and characterizations of the logic cells.
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