Applied Materials had 25 patents in advanced materials during Q1 2024. The patents filed by Applied Materials Inc in Q1 2024 include diagnostic substrates for extracting plasma parameters, introducing encapsulation material into optical devices to reduce substrate thickness variation, encapsulating nanostructured optical devices using asymmetric selective PVD, a flow ratio controller valve for fluid flow control, and an integrated processing tool for lithium metal deposition in energy storage devices. GlobalData’s report on Applied Materials gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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Applied Materials grant share with advanced materials as a theme is 32% in Q1 2024. Grant share is based on the ratio of number of grants to total number of patents.
Recent Patents
Application: Mems resonator sensor substrate for plasma, temperature, stress, or deposition sensing (Patent ID: US20240102876A1)
The patent filed by Applied Materials Inc. discloses diagnostic substrates and methods for extracting plasma parameters using an array of resonators on a substrate. The diagnostic substrate includes resonators with different structures to measure plasma and wafer parameters, such as electron density, temperature, ion density, substrate temperature, and stress changes. The method involves measuring baseline responses, striking the plasma, measuring resonance frequencies, and extracting the desired parameters from the data obtained.
Additionally, the fabrication method for the diagnostic substrate involves forming an array of resonators with different structures, such as capacitive or inductive resonators, piezoelectric resonators, or electromagnetic and acoustic resonators. These resonators are designed to detect various plasma properties and substrate changes. The resonators can be communicatively coupled to an antenna for wireless communication of measured frequencies and can include RF circuitry for signal processing. Overall, the patent aims to provide a comprehensive solution for monitoring and controlling plasma chambers using innovative diagnostic substrates and methods.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
