Macronix International has been granted a patent for a memory device with a unique structure. The device includes specific dielectric, channel, source, and drain structures, enhancing performance. The manufacturing method involves forming pillar structures and epitaxially growing source and drain structures for efficient memory device production. GlobalData’s report on Macronix International gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Macronix International, Magnetic RAMs was a key innovation area identified from patents. Macronix International's grant share as of April 2024 was 84%. Grant share is based on the ratio of number of grants to total number of patents.
Memory device with specific source and drain structure alignment
A recently granted patent (Publication Number: US11968831B2) discloses a manufacturing method for a memory device involving the formation of a pillar structure on a substrate. This pillar structure includes a pair of channel layers extending in parallel along a specific direction. The method further includes the creation of first and second trenches through the pillar structure to form channel structures, with source and drain structures epitaxially grown on each side of the channel structures. The alignment of the drain structure with the source structure in the specified direction is a key feature of this method.
Additionally, the patent details the formation of insulating and dielectric layers on the substrate, along with the creation of a recess for the channel layers. The method emphasizes controlling the growing conditions to achieve specific ratios in length for the source and drain structures concerning the trenches. The dimensions of the source structure, drain structure, and channel layers are also specified within a certain range. The innovative aspect of this manufacturing method lies in the precise alignment and growth of the source and drain structures within the trenches, enhancing the efficiency and performance of the memory device.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
