Applied Materials had 53 patents in robotics during Q1 2024. The patents filed by Applied Materials Inc in Q1 2024 focus on methods and apparatus for semiconductor processing tools. These include moving susceptors in processing systems, cleaning tooling parts, chemical mechanical polishing, motion planning for processing substrates, and multi-turn drive assemblies for robot arms enabling 360-degree rotation. These innovations aim to improve efficiency and precision in semiconductor manufacturing processes. GlobalData’s report on Applied Materials gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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Applied Materials grant share with robotics as a theme is 50% in Q1 2024. Grant share is based on the ratio of number of grants to total number of patents.
Recent Patents
Application: Susceptor transfer for process chamber (Patent ID: US20240105485A1)
The patent filed by Applied Materials Inc. describes a method for moving a susceptor in a processing system used for semiconductor processing. The method involves transferring the susceptor from an enclosure to a process chamber while maintaining a non-atmospheric pressure throughout the process. Substrates are positioned on the susceptor during specific time periods for processing, with different processes being performed on each substrate.
The method includes moving the susceptor through various chambers, such as load lock chambers or storage chambers, while ensuring a non-atmospheric pressure environment. Additionally, robots are utilized to handle the movement of the susceptor and substrates within the system. Different processes are carried out on substrates placed on the susceptor in the process chamber, with the pressure maintained at a vacuum level throughout the entire process. Overall, the patent outlines a detailed method for efficiently handling substrates in a semiconductor processing system while maintaining specific pressure conditions for optimal processing outcomes.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
