Tokyo Electron had 30 patents in robotics during Q2 2024. Tokyo Electron Ltd filed patents for a transfer apparatus with vacuum transfer modules, a film forming apparatus with a chamber and heat source, a method for plasma processing with wear detection, a processing system with a storage module and transfer robot, and a transfer module with transfer chambers and opening/closing door for object transfer. GlobalData’s report on Tokyo Electron gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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Tokyo Electron had no grants in robotics as a theme in Q2 2024.
Recent Patents
Application: Transfer apparatus (Patent ID: US20240213057A1)
The patent filed by Tokyo Electron Ltd. describes a transfer apparatus for wafers in a vacuum environment, consisting of two vacuum transfer modules with transfer robots, a connecting module with a rotatable wafer support, and ring supporting members. The apparatus allows for the transfer of wafers and rings between the modules efficiently and securely. The design ensures that the length of the connecting module is smaller than the wafer diameter, and the ring supporting members are outwardly extending from the wafer support.
The apparatus includes features such as rotatable wafer support and ring supporting members, controlled by a controller to facilitate the transfer process. The wafer support surface has a diameter smaller than the length of the connecting module, and the ring supporting members are arranged at intervals of 120° around a shaft member. The controller manages the placement and rotation of wafers and rings on the support members, ensuring precise and controlled movement between the vacuum transfer modules. Overall, the transfer apparatus offers a reliable and efficient solution for handling wafers and rings in a vacuum environment.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
